XUE, Zihan. An Epitaxial Layer Thickness Inversion Framework Based on Cauchy Dispersion and Multiple-Beam Interference Models. Scientific Journal of Technology, [S. l.], v. 8, n. 8, p. 29–40, 2026. DOI: 10.54691/3972yn72. Disponível em: https://sjtechnology.org/index.php/ojs/article/view/522. Acesso em: 26 aug. 2026.